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Zhu, Yada
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Co-clustering structural temporal data with applications to semiconductor manufacturing
Zhu Y., He J. ACM Transactions on Knowledge Discovery from Data 10(4): 1-18, 2016. Type: Article
New improvements in storage, measurement, and control methods in semiconductor engineering are rapidly producing more data. Today, there are valuable tools for monitoring and gathering time-based data for manufacturing devices such as ...
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Nov 15 2016
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